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AMEC: Driving the Frontier of Advanced Semiconductor Fabrication

Advanced Micro-Fabrication Equipment Inc. (AMEC) is one of China’s most prominent semiconductor equipment manufacturers, specializing in plasma etching and MEMS fabrication technologies. Headquartered in Shanghai, AMEC provides the critical tools required for the production of advanced chips at process nodes of 5nm and below. The company plays a key role in China’s efforts to localize high-end semiconductor equipment and reduce reliance on foreign technologies.

  • 01

    Core Products

    AMEC’s core products include inductively coupled plasma (ICP) etch systems and atomic layer etch (ALE) tools, used in front-end semiconductor manufacturing. These systems are crucial for producing leading-edge devices such as logic chips, DRAM, and 3D NAND, where nanometer-scale precision and repeatability are paramount. The company is also a major supplier of tools for MEMS fabrication and compound semiconductor processing.

  • 02

    Technology Strengths

    The firm’s strength lies in combining deep expertise in materials engineering, vacuum physics, and control systems with robust, modular hardware platforms. AMEC’s etching systems are designed to achieve ultra-uniform etch profiles, high aspect ratios, and compatibility with extreme ultraviolet (EUV)-ready nodes. These capabilities are central to meeting the demands of cutting-edge foundries and IDMs.

  • 03

    International Collaboration

    To accelerate innovation in next-generation process technologies, AMEC collaborates with institutions such as Stanford University and the Technical University of Berlin. These partnerships focus on topics including atomic-scale precision etching, equipment diagnostics powered by machine learning, and hybrid material integration. Research collaboration extends to training engineers, validating novel etch chemistries, and prototyping new chamber designs.

     

    As the global chip industry pushes toward smaller nodes, more complex architectures, and heterogeneous integration, AMEC is positioning itself as a strategic enabler of advanced fabrication. Through global academic alliances and continuous process co-development, the company aims to shape the future of nanoscale manufacturing.